Por favor utiliza este link para citar o compartir este documento: http://repositoriodigital.academica.mx/jspui/handle/987654321/451480
Título: Structural and electro-thermal analysis of a magnetic resonant sensor structure based on Lorentz force
Palabras clave: Física, Astronomía y Matemáticas
MEMS
magnetic field
Lorentz force
dynamic torsional model
resonant frequency
Editorial: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
Descripción: The structural and electro-thermal analysis of a resonant structure for a magnetic sensor based on MEMS technology is presented in this paper. The effect of squeeze-film damping is included by mean of a theoretical model and using finite element software. In addition, analysis of the dynamic torsional model of magnetic structure is realized. The design of resonant structure considers a hollow rectangular configuration with thin beams of 20 #956;m of width and 1.50 #956;m of thickness suspended over a cavity that takes advantage of the Lorentz force principle allowing the detection of magnetic fields at levels of tens Gauss. The analytical results and simulations with finite element indicate that the vertical displacement has a linear behavior with low power consumption and a maximum Von Mises stress of 20.22MPa with a peak to peak voltage of 2 V
Other Identifiers: http://www.redalyc.org/articulo.oa?id=94219304
Aparece en las Colecciones:Superficies y vacío

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